Backscattering spectrometry with 4He, 14C, 14N, 40Ar and 84Kr analysis beams with energies 1.5-5.0 MeV
The resolution of a silicon surface-barrier detector (Ortec BA-14-25-100) has been measured for analysis beams of 4He, 12C, 14N, 40Ar and 84Kr (in the 1.5-5.0 MeV energy range) backscattered from a thin ( ∼ 30 Å) Ta film. These measured values of the detector resolution were used in the calculation of mass resolution vs target mass curves for analysis beam energies 2, 5 and 10 MeV. Tabulated values of energy loss for the analysis ions in the target material were used with the measured values of detector resolution to calculate depth resolution vs beam energy curves for target materials Ta, Ni and Nb. The results are generally disappointing; there appears to be no major advantage to be gained by use of these heavier-than- 4He analysis beams in this energy region.