Preparation of Gd-Ba-Cu-O Superconducting Thin Films on SrTiO3, Al2O3 and ZrO2 by Magnetron Sputtering

Thin superconducting films of Gd-Ba-Cu-O have been prepared on SrTiO₃, Al₂O₃ and ZrO₂ substrates by magnetron sputtering from single target of sintered material in an oxygen-argon atmosphere. The films were deposited at substrate temperatures between 770 and 850°C. In situ heat treatment at 400°C in pure O₂ atmosphere the films exhibited superconductivity with zero resistance transition temperatures 90.2, 91.5 and 89 K for SrTiO₃, Al₂O₃ and ZrO₂ substrates, respectively.