Interaction of laser radiation with diamond films
Abstract
Laser etching is investigated as a method for the local surface treatment of diamond films. In particular, the advantages of the repetitively pulsed XeCl laser over the CO2 laser in diamond film etching are demonstrated experimentally. With the excimer laser, an etching rate of 3000 A/pulse has been achieved for a power density of 8 J/sq cm.
- Publication:
-
Akademiia Nauk SSSR Doklady
- Pub Date:
- 1988
- Bibcode:
- 1988DoSSR.303..598A
- Keywords:
-
- Beam Interactions;
- Diamond Films;
- Diamonds;
- Etching;
- Laser Beams;
- Laser Target Interactions;
- Thin Films;
- Excimer Lasers;
- Physical Optics;
- Pulsed Lasers;
- Surface Finishing;
- Xenon Chloride Lasers;
- Lasers and Masers