Novel optical approach to atomic force microscopy
Abstract
A sensitive and simple optical method for detecting the cantilever deflection in atomic force microscopy is described. The method was incorporated in an atomic force microscope, and imaging and force measurements, in ultrahigh vacuum, were successfully performed.
- Publication:
-
Applied Physics Letters
- Pub Date:
- September 1988
- DOI:
- 10.1063/1.100061
- Bibcode:
- 1988ApPhL..53.1045M
- Keywords:
-
- Cantilever Beams;
- Laser Microscopy;
- Optical Microscopes;
- Laser Interferometry;
- Noise Spectra;
- Ultrahigh Vacuum;
- Instrumentation and Photography