Crystal growth and mechanical properties of semiconductor alloys
Abstract
The mechanical properties of semiconductor materials are related to changes in electronic and optical properties that may occur during the processing of materials into wafers and wafers into devices. Recent theoretical models related hardness in ternary semiconductor alloys to fundamental atomic properties, but few data are available. The report details the progress made in exploring methods for mechanical property studies of these alloys. Three approaches were used: hardness measurements in thick films (10-100 micrometer) using conventional microhardness, techniques; hardness measurements in thin films (less than 1 micrometer) using a nanoindenter; and the growth of bulk samples for use in conventional mechanical tests.
- Publication:
-
Stanford Univ. Report
- Pub Date:
- May 1987
- Bibcode:
- 1987stan.reptQ....S
- Keywords:
-
- Crystal Growth;
- Optical Properties;
- Semiconductors (Materials);
- Ternary Alloys;
- Hardness;
- Mechanical Engineering;
- Microhardness;
- Thick Films;
- Thin Films;
- Solid-State Physics