Stable miniature pressure transducer using inorganic bonding construction
Abstract
A compact, 6 gram, aerospace quality absolute pressure transducer with the inherent stability of larger traditional transducers is discussed. The design incorporates a dielectrically isolated piezoresistive sensor on a micromachined silicon diaphragm for superior characteristics over a broad temperature range. The diaphragm is hermetically sealed into the housing without the use of organic materials to eliminate leakage of any pressure media through the transducer. The absolute reference cavity is also hermetically sealed for long term reliability. Benefits of the new design are long term stability, repeatability and accuracy versus temperature. Actual data on environmental capabilities and performance are presented.
- Publication:
-
33rd International Instrumentation Symposium
- Pub Date:
- 1987
- Bibcode:
- 1987isa..symp..373P
- Keywords:
-
- Diaphragms (Mechanics);
- P-N Junctions;
- Piezoresistive Transducers;
- Pressure Sensors;
- Strain Gages;
- Aerospace Engineering;
- Measuring Instruments;
- Organic Materials;
- Instrumentation and Photography