DOE (Department of Energy) national laboratories and the semiconductor industry: Continuing the joint planning

The extensive capabilities, expertise, and existing activities of the national laboratories of the U.S. Department of Energy could make a significant contribution to the technical needs of the U.S. semiconductor industry. During a May 1987 workshop at Sandia National Laboratories, representatives of the national laboratories and the semiconductor industry identified a broad range of specific technical areas for collaborative research. These technologies can be grouped in the categories of: patterning and metrology; interconnects and packaging; thin films and pattern transfer; reliability failure and yield analysis; compound seniconductors; and automation and facilities. In each category. specific industry needs were identified and the laboratories with the most advanced capabilities in each technology were named to lead potential collaborative reserach porgrams. The workshop was successful in identifying a number of specific research topics suitable for future collaborative research between the semiconductor industry and the national laboratories. The workshop demonstrated that linkages exist between industrial technical needs and the national laboratories' capabilities.