Use of self-scanned photodiode array for X-ray multilayer characterization
Abstract
A method for the X-ray multilayer characterization is described by which all the details of reflectivity measurements, both perfectly specular and nonspecular, can be obtained using a linear photodiode detector. The linear detector is composed of a linear array made of 1024 diodes cooled at -100 C, which is mounted on a specially designed goniometer on the moving detector arm. Such a system is conceptually equivalent to a set of 1024 25-micron-wide detectors collecting data simultaneously. The spatial resolution is 50 microns. The information obtained by experiments using the diode array is compared with the information yielded by the classical slit/counter arrangement.
- Publication:
-
Soft X-ray optics and technology
- Pub Date:
- 1987
- Bibcode:
- 1987SPIE..733..398C
- Keywords:
-
- Linear Arrays;
- Photodiodes;
- X Ray Tubes;
- Beams (Radiation);
- Goniometers;
- Incident Radiation;
- Optical Scanners;
- Pixels;
- Reflected Waves;
- Instrumentation and Photography