Present status of X-ray optics research
Abstract
Recent advances in the design of optical systems for soft 0.5-4.5-nm X-rays are surveyed. Consideration is given to grazing-incidence mirrors, multilayer mirrors, and diffraction optics, but the emphasis is on the properties and fabrication of microzone plates on monocrystalline Si substrates. Topics addressed include electron-beam writing, X-ray interference, sputtered sliced plates, holographic zone plates, and phase zone plates based on laminar and sawtooth structures. Drawings, diagrams, and tables of numerical data are provided.
- Publication:
-
Soft X-ray optics and technology
- Pub Date:
- 1987
- Bibcode:
- 1987SPIE..733..294R
- Keywords:
-
- Fabrication;
- Grazing Incidence;
- Holography;
- Mirrors;
- Optical Equipment;
- X Rays;
- Bragg Angle;
- Electron Beams;
- Refractivity;
- Spectral Resolution;
- Optics