A small-sized, low-cost, solid-state accelerometer development of the AQM accelerometer series

The architectural design and physical implementations of a servoed accelerometer including a sensitive mechanical structure of less than 10 cu mm are described. In particular, attention is given to the basic technological possibilities, the general concept and architecture, functional and technological optimization, and implementations of electromagnetic and electrostatic sensors. It is shown that the total volume of the sensor, including the looping electronics, may not exceed 2.5 cu cm, for an ultimate overall error below 10 mG and a 100 G measuring range. As a side effect of their miniaturized size, the sensor structures have good survivability with respect to mechanical shocks.