Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry
Abstract
Results of a depth-profile study by spectroscopic ellipsometry of transparent thin films (about 170 nm thick) of ZnS and MgO on vitreous silica substrates are reported. A linear regression analysis of the data reveals the distribution of voids in these transparent thin films. The present work and previous results obtained on a a-Ga film support the model of film growth based on continual competition for random cone growth. The present void structure distribution suggests an exponent of 3 for the power law of the growth function for these films.
- Publication:
-
Optics Letters
- Pub Date:
- July 1987
- DOI:
- 10.1364/OL.12.000456
- Bibcode:
- 1987OptL...12..456V
- Keywords:
-
- Depth Measurement;
- Ellipsometers;
- Film Thickness;
- Magnesium Oxides;
- Nondestructive Tests;
- Thin Films;
- Zinc Sulfides;
- Density Distribution;
- Oxide Films;
- Silica Glass;
- Spectroscopy;
- Void Ratio;
- Instrumentation and Photography