Ellipsometry: Theory, methods, applications
Abstract
The papers contained in this volume provide an overview of recent developments in the theory and methods of ellipsometry and its applications to the study of the surfaces and structure of reflecting systems. Topics discussed include ellipsometry of anisotropic media, optimal photometric ellipsometry, a study of inhomogeneous structures using immersion ellipsometric measurements, and ellipsometric instrumentation. Papers are also presented on the characteristics of radio wave ellipsometry, determination of the optical constants of semiconducting materials by ellipsometry, and ellipsometric spectroscopy of exciton resonances.
- Publication:
-
Novosibirsk Izdatel Nauka
- Pub Date:
- 1987
- Bibcode:
- 1987NoIzN....R....R
- Keywords:
-
- Ellipsometers;
- Optical Measurement;
- Surface Roughness;
- Angles (Geometry);
- Dielectrics;
- Fourier Analysis;
- Inhomogeneity;
- Lattice Parameters;
- Microelectronics;
- Molecular Beam Epitaxy;
- Nondestructive Tests;
- Polarized Light;
- Refractivity;
- Semiconductors (Materials);
- Single Crystals;
- Surface Properties;
- Technology Utilization;
- Thin Films;
- Instrumentation and Photography