Rutherford backscattering studies of surface density reduction in ion-implanted and excimer-laser-annealed Ge
Abstract
- Publication:
-
Journal of Physics and Chemistry of Solids
- Pub Date:
- 1987
- DOI:
- 10.1016/0022-3697(87)90018-7
- Bibcode:
- 1987JPCS...48..237K