Optimization of outlet channel of plasma ion source
Abstract
Design and operation principle of arc hollow-cathode ion source are presented. The effect of source outlet length on emitted ion current and ionization efficiency have been investigated by means of this source. Empirical formula for calculating the source ionization efficiency has been derived, and some of its characteristics are presented. The noticeable effect of emission channel geometry on ion currents of the source and efficiency of using working substance is shown.
- Publication:
-
Unknown
- Pub Date:
- 1986
- Bibcode:
- 1986oocp.rept.....K
- Keywords:
-
- Ion Beams;
- Ion Sources;
- Optimization;
- Outlets;
- Plasmas (Physics);
- Efficiency;
- High Vacuum;
- Ionization;
- Length;
- Shapes;
- Plasma Physics