Laser phase-detector and counter for fine displacement measurement
Abstract
A simple technique for the measurement of fine displacement has been developed. With use of an HeNe laser, an optical phase-detector, and counter, a displacement accuracy of 300 nm has been demonstrated over a range of 2 cm.
- Publication:
-
Lasers 1985; Proceedings of the Eighth International Conference
- Pub Date:
- 1986
- Bibcode:
- 1986lase.conf..526R
- Keywords:
-
- Displacement Measurement;
- Helium-Neon Lasers;
- Laser Applications;
- Phase Detectors;
- Counters;
- Optical Heterodyning;
- Optical Measuring Instruments;
- Phase Demodulators;
- Instrumentation and Photography