A destructive and a nondestructive technique for depth profiling using PIXE is tested on various concentration profiles of Zn depletion in initially homogeneous Ag 3 at.% Zn alloys. The first consists of measuring the yield of X-rays emerging from thin film targets prepared by deposition of Ag and Zn hydroxides originating from slabs of controlled thickness removed from the analysed sample. The second consists of deconvoluting a set of X-ray yield measurements carried out with various energies. Both techniques are cross-referenced with electron microprobe analysis run on a transverse section of the corresponding specimens, but can also be applied to profiles extending over depths too small for analysis on a transverse section. Internal coherence between the different concentration profiles obtained is checked on the basis of Zn diffusivity in Ag-Zn alloys.