Auger electron spectroscopy sputter depth profiles on Al<SUB>x</SUB>Ga<SUB>1 - x</SUB>As protected by As and GaAs ultrathin layers - NASA/ADS

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NASA/ADS

Auger electron spectroscopy sputter depth profiles on Al_xGa_{1 - x}As protected by As and GaAs ultrathin layers

Publication:: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
Pub Date:: November 1986
DOI:: 10.1116/1.583509
Bibcode:: 1986JVSTB...4.1301E

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