Simultaneous multiwavelength operation of a commercial rare gas halide laser

Simultaneous dual wavelength operation of a commercial-discharge excited rare gas halide excimer laser is reported for the first time. A combined energy output in excess of 20 mJ was obtained for the 193 and 248 nm ArF and KrF B to X transitions oscillating simultaneously, and also for the 248 and 351 nm KrF and XeF transitions. Analysis indicates that significantly higher dual wavelength energies should be possible.