CY series integrated pressure transducer
Abstract
The CY series integrated pressure transducer is a new third generation semiconductor pressure sensing element whose primary performance indicators have reached or surpassed the advanced levels for similar products abroad. In order to make the transducer have ideal performance parameters, the CY series pressure transducer integrates on one chip a pressure sensitive bridge, signal amplification circuit, and temperature compensation circuit. Since silicon material 100 crystal orientation has a mature etching process and at the same time is more ideal for integrated circuit process, therefore P-type 100 crystal orientation silicon chips were chosen for the CY series products, and pressure-sensitive resistance lines follow 011 and 011 crystal orientation.
- Publication:
-
China Rept Sci Technol JPRS CST
- Pub Date:
- March 1986
- Bibcode:
- 1986ChRST......141B
- Keywords:
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- Chips (Electronics);
- Pressure Sensors;
- Semiconductors (Materials);
- Thermodynamic Properties;
- Wheatstone Bridges;
- Sensitivity;
- Thermal Stability;
- Instrumentation and Photography