Surface profiling by phase-locked interferometry
Abstract
A noncontacting surface profiling technique with 1-nm height resolution is described. A feedback arrangement keeps in quadrature the two arms of a confocal interference microscope by modulating the reference beam using an electrooptic phase modulator.
- Publication:
-
Applied Optics
- Pub Date:
- July 1986
- DOI:
- 10.1364/AO.25.002372
- Bibcode:
- 1986ApOpt..25.2372M
- Keywords:
-
- Mach-Zehnder Interferometers;
- Phase Locked Systems;
- Surface Acoustic Wave Devices;
- Topography;
- Electro-Optics;
- Phase Modulation;
- Instrumentation and Photography;
- METROLOGY;
- PROFILES;
- INTERFEROMETRY;
- SURFACES;
- PHASE LOCKING