Laser interferometric linear measuring techniques
Abstract
The state of the art of laser interferometry, applications, and developments are treated. The high level of laser interferometry for linear measurement techniques led to a broadening and diversification of applications in the field of precision tests of machine tools and measuring equipment, and to calibration in research and development. The construction of, and the requirements for a laser interferometer are outlined. Many special setups can individually be built by the variation and combination of optical components. Open questions and wishes of users in the fields of compensation systems, built-in odometric systems on machines, and the development of light and small interferometers with semiconductor lasers are discussed.
- Publication:
-
Verein Deutscher Ingenieure Measuring Methods using Optoelectronic Semiconductor Components
- Pub Date:
- 1985
- Bibcode:
- 1985vdim.rept..111S
- Keywords:
-
- Dimensional Measurement;
- Laser Applications;
- Laser Interferometry;
- Length;
- Technology Utilization;
- Calibrating;
- Machine Tools;
- Precision;
- Product Development;
- Semiconductor Lasers;
- Lasers and Masers