Cryogenic laser calorimetry for impurity analysis
Abstract
The results of a one-year effort to determine the applicability of laser-calorimetric spectroscopy to the study of deep-level impurities in silicon are presented. Critical considerations for impurity analysis by laser-calorimetric spectroscopy are discussed, the design and performance of a cryogenic laser calorimeter is described, and measurements of background absorption in high-purity silicon are presented.
- Publication:
-
California Univ., Los Angeles Report
- Pub Date:
- May 1985
- Bibcode:
- 1985ucla.rept.....S
- Keywords:
-
- Cryogenics;
- Heat Measurement;
- Impurities;
- Laser Spectroscopy;
- Silicon;
- Absorption Spectra;
- Calorimeters;
- Cryogenic Equipment;
- Laser Applications;
- Performance Tests;
- Instrumentation and Photography