Laser activated MTOS microwave device
Abstract
A light-activated semiconductor device usable as an optoelectronic switch, pulse generator or optical detector is provided. A semiconductor device is disclosed which provides back-to-back metal-thin oxide-silicon (MTOS) capacitors. Each capacitor includes a thin, light-absorptive aluminum electrode which overlies a thin oxide layer and a lightly doped region implanted in an intrinsic silicon substrate.
- Publication:
-
National Aeronautics and Space Administration Report
- Pub Date:
- July 1985
- Bibcode:
- 1985nasa.reptY....M
- Keywords:
-
- Capacitors;
- Laser Applications;
- Microwave Circuits;
- Switches;
- Minority Carriers;
- Patents;
- Photoelectric Cells;
- Photoelectric Materials;
- Pulse Generators;
- Electronics and Electrical Engineering