Instrumentation for surface studies for novel electronics processing
Abstract
The instrumentation purchased on this contract is to be used in the study of solid-surface phenomena and the relation of these phenomena to developing new processing or fabrication techniques for micro-electronics. Development of new processing techniques including laser direct writing, photon-assisted dry processing, the formation of metal silicides, and ion etching are currently major research efforts in the Columbia Microelectronics Sciences Laboratories. The work is supported by research contracts with AFOSR, DARPA, JSEP, and Rome Air Development Center.
- Publication:
-
Columbia Univ. Annual Report
- Pub Date:
- December 1985
- Bibcode:
- 1985cuny.reptQ....O
- Keywords:
-
- Fabrication;
- Metal Surfaces;
- Microelectronics;
- Research Management;
- Etching;
- Ion Beams;
- Laser Applications;
- Silicides;
- Solid-State Physics