In situ studies of energy deposition by ion beams
Abstract
The results of initial surface acoustic wave studies on a variety of systems including lithium niobate (LiNbO3), quartz (SiO2), silicon on LiNbO3 silicon on SiO2 and silicon on sapphire, which have been subjected to ion implantation and to visible laser irradiation. In addition, results of ion beam mixing studies on the Aluminum-Silicon system are reported, as well as the application of nuclear resonance profiling to a study of the near surface aluminum distribution in silicon.
- Publication:
-
Final Technical Report
- Pub Date:
- June 1985
- Bibcode:
- 1985conn.rept.....B
- Keywords:
-
- Deposition;
- Ion Beams;
- Sapphire;
- Semiconductor Devices;
- Silicon Dioxide;
- Surface Acoustic Wave Devices;
- Ion Implantation;
- Irradiation;
- Visible Spectrum;
- Atomic and Molecular Physics