Electrical method of making conductive paths in silicon
Abstract
This patent discloses a method of forming an electrical conductive path between parallel surfaces of a substrate wherein a pulsed voltage, non-current limited, power supply causes aluminum to electromigrate between at least two opposing points to form an alloy with silicon of the substrate. Electronic devices can be thus placed upon opposite sides of the substrate for purposes of packaging, shielding, etc.
- Publication:
-
Air Force Interim Report
- Pub Date:
- August 1985
- Bibcode:
- 1985aifo.reptW....L
- Keywords:
-
- Alloys;
- Aluminum;
- Electrical Properties;
- Silicon;
- Alignment;
- Electric Connectors;
- Electronic Packaging;
- Patents;
- Pulses;
- Sides;
- Substrates;
- Electronics and Electrical Engineering