Optical profiling instrument for the measurement of the figure and finish of optical quality surfaces
Abstract
This paper discusses the use of WYKO non-contracting optical profiling microscope for the measurement of the figure and finish of optical-quality surfaces. THe original instrument and our hardware and software modifications are described along with recent and current studies making use of this facility.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- September 1985
- Bibcode:
- 1985STIN...8631868C
- Keywords:
-
- Optical Measurement;
- Surface Finishing;
- Surface Properties;
- Microscopy;
- Optical Equipment;
- Quality;
- Instrumentation and Photography