An NMOS evaluation circuit
Abstract
An electrical evaluation circuit was designed for the 700 Angstrom LOCOS N-MOS E-D process. The smallest structure in the circuit was 6 micron. Two runs were made, the first having the code IC370, and the second IC372. A 4 micron (IC377) type was developed. The IC370 and the IC372 are 3.3 asterisk 3.3 um circumflex 2. The IC377 is 2.2 asterisk 2.2 um circumflex 2. The circuit extracts electrical and process-parameters. Both types of parameters can be used for circuit simulation, while the extracted process-parameters can be used to evaluate the process.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- June 1985
- Bibcode:
- 1985STIN...8631820D
- Keywords:
-
- Circuit Reliability;
- Electrical Measurement;
- Metal Oxide Semiconductors;
- Circuit Diagrams;
- Computer Aided Design;
- Systems Simulation;
- Electronics and Electrical Engineering