Infrared detector research metal film bolometer detectors. Part 3: Preparation and performance

This report describes the preparation and performance of metal film bolometer infrared detectors using a versatile fabrication technology for both single-element detectors and focal plane arrays. Detectors are prepared on conventional semiconductor-grade silicon substrates and extensive use is made of state-of-the-art microcircuit manufacture techniques. A detectivity of approx. 2 x 10 to the 8th power cm sq root of Hz. per watt and speed of response of < or = to 1 ms can be achieved, for detector element sizes as small as 50 micron. Recipients are warned that information contained in this document may be protected by patent rights.