Superfine laser position control using statistically enhanced resolution in real time
Abstract
An electronic control system is described which analyzes digitized TV images to simultaneously position 96 time-and-space multiplexed beams for a large KrF laser system. Degradation of position resolution due to the intervals between digitization is discussed, and improvement of this resolution by using inherent system noise is demonstrated. The methods shown resolve arbritary intensity boundaries to small fraction of the discrete sample spacing.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- 1985
- Bibcode:
- 1985STIN...8525817K
- Keywords:
-
- Control Equipment;
- Digital Systems;
- Image Processing;
- Laser Applications;
- Television Systems;
- Beams (Radiation);
- Excimer Lasers;
- Krypton Fluoride Lasers;
- Multiplexing;
- Space-Time Functions;
- Spatial Resolution;
- Lasers and Masers