Instrumental limitations and current prospects for materials research with the latest generation of high-resolution electron microscopes

The performance of current high-resolution electron microscopy (HREM) equipment is surveyed, and applications to the characterization of solids are described. The fundamental principles of image formation are reviewed, and the capabilities and limitations of current instruments are discussed. Applications to nonstoichiometric materials, thin films and small-particle growth, defects and interfaces in semiconductors, and interfaces in metals and ceramics are illustrated with sample images. The prospects for improvements such as computer control of HREM parameters, special treatment of samples, provision for heating specimens during HREM characterization, and variable HREM voltage to study HREM ionization damage are also considered.