An integrated piezoelectric-insulator DMOST surface-acoustic-wave convolver
Abstract
A detailed investigation and analysis of a new device, the PI-DMOST convolver, is presented. The feasibility of this type of convolver has been previously demonstrated [1]. In this paper, we present the experimental results of another configuration of the device, fabricated with a new process. The theory is presented in detail for operation of the convolver using first-order Rayleigh-mode waves, and then extended to include other SAW modes. The convolver measures 100 μm by 1 cm, has a dynamic range of 70 dB, and is realized using ZnO piezoelectric films on a planar-processed silicon wafer.
- Publication:
-
Solid State Electronics
- Pub Date:
- November 1985
- DOI:
- Bibcode:
- 1985SSEle..28.1117C
- Keywords:
-
- Convolution Integrals;
- Field Effect Transistors;
- Interdigital Transducers;
- Metal Oxide Semiconductors;
- Piezoelectricity;
- Surface Acoustic Wave Devices;
- Acoustic Delay Lines;
- Rayleigh Waves;
- Silicon;
- Transmission Efficiency;
- Waveguides;
- Zinc Oxides;
- Electronics and Electrical Engineering