Sputter deposited multilayer V-UV mirrors
Abstract
The design and fabrication of aluminum/niobium multilayers to be used as normal-incidence reflectors for 300 A radiation are presented. Preliminary characterization results are discussed showing the effects of interfacial roughness and diffusion.
- Publication:
-
Applications of thin-film multilayered structures to figured X-ray optics
- Pub Date:
- August 1985
- DOI:
- 10.1117/12.949668
- Bibcode:
- 1985SPIE..563..195F
- Keywords:
-
- Extreme Ultraviolet Radiation;
- Metal Films;
- Mirrors;
- Reflectors;
- Sputtering;
- X Ray Diffraction;
- Aluminum;
- Coatings;
- Diffusion;
- Interfaces;
- Niobium;
- Superlattices;
- Optics