Survey Of The Finish Characteristics Of Machined Optical Surfaces

Samples of precision machined optical flats solicited from a number of commercial suppliers were examined by both visual and Nomarski microscopy and were measured using a Wyko noncontacting profiling instrument. The profile data were analyzed in terms of finish statistics which are directly related to optical performance, and these are presented in a common format and compared. The results are of intrinsic interest and suggest a number of general observations regarding surface materials and the machining process.