Development of a high current ion source for ion implantation
Abstract
A duopigatron ion source, based on Sandia National Laboratories design, has been designed and constructed. Some of the preliminary operating parameters of the source using argon, BF 3 and AsH 3 have been obtained. At an are current of 8 A, the total unanalyzed beam current is 13.5 mA at 30 kV extraction potential. The total unanalyzed beam currents are 19.5 mA using BF 3 gas and 32 mA using AsH 3.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- May 1985
- DOI:
- 10.1016/0168-583X(85)90103-X
- Bibcode:
- 1985NIMPB..10..767G