Materials characterization with a He + microbeam
Abstract
A beam of 2 MeV He + ions has been apertured and demagnified to give a spot approximately 1 μ in diameter. The beam can be scanned in a 150 by 150 μ raster, and a secondary electron image formed to assist in placing the beam on features to be analyzed. Rutherford backscattering spectrometry (RBS) and particle induced X-rays emission (PIXE) have been performed with a spatial resolution of about 2 μ and used to analyze metallized conductors for microelectronic applications.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- May 1985
- DOI:
- 10.1016/0168-583X(85)90086-2
- Bibcode:
- 1985NIMPB..10..697M