Depth profiles of 35 keV 3He ions in metals
Abstract
The depth profiles of 3He implanted at 35 keV energy into Al, Ti, V, Ni, Cu, Zn, Zr, Nb, Ag, Sn, Ta, W, Au and Bi targets have been measured using the thermal neutron reaction 3He(n, p) 3H. The profiles obtained from the energy distribution of the emitted protons show a marked Z 2-oscillation in both the most probable depth and depth straggling. The measured values are compared to Monte Carlo computer simulation results.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- May 1985
- DOI:
- 10.1016/0168-583X(85)90315-5
- Bibcode:
- 1985NIMPB..10..592L