Preparation of tantalum targets of known thicknesses
Abstract
A series of carbon-backed tantalum targets were produced in a heavy ion sputtering system with a Penning ion source. The target thicknesses were then measured using the alpha-ray energy loss method. The resulting tabulated measurements were reproducible, and make possible the production of carbon-backed tantalum targets with pre-determined thicknesses ranging from 20 μg/cm 2 to 1 mg/cm 2.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- June 1985
- DOI:
- 10.1016/0168-9002(85)90958-1
- Bibcode:
- 1985NIMPA.236..545A