Summary Abstract: Lateral solid phase epitaxy of silicon on SiO2 in a silicon molecular beam epitaxy system
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- March 1985
- DOI:
- 10.1116/1.583130
- Bibcode:
- 1985JVSTB...3..739L