Growth of diamond at room temperature by an ion-beam sputter deposition under hydrogen-ion bombardment
Abstract
The structure and crystal phase of carbon films prepared by an ion-beam sputter deposition were studied. The properties of the deposited carbon films were influenced by a hydrogen-ion bombardment during the film growth. It is noted that the hydrogen-ion bombardment activates the growth of diamond in the deposited carbon film. Diamond particles of 0.1∼1 μm in diameter, which showed well-defined morphology of diamond, were successfully grown at room temperature on nondiamond substrates.
- Publication:
-
Journal of Applied Physics
- Pub Date:
- August 1985
- DOI:
- 10.1063/1.336066
- Bibcode:
- 1985JAP....58.1693K
- Keywords:
-
- Crystal Growth;
- Diamonds;
- Hydrogen Ions;
- Ion Beams;
- Room Temperature;
- Sputtering;
- Carbon;
- Crystal Structure;
- Electron Diffraction;
- Optical Properties;
- Raman Spectra;
- Substrates;
- Thin Films;
- Solid-State Physics