Large-scale monolithic SAW convolver/correlator on silicon

The development of a monolithic SAW storage convolver/correlator on a Si semiconductor substrate is discussed. For this process, a technique compatible with MOS technology for depositing highly oriented ZnO piezoelectric thin films has been developed. The development of very large scale SAW devices, which show delay times up to 10 microsec, and convolver structures with very long interaction times are discussed. These devices operate at 340 MHz and demonstrate insertion loss better than -35 dB at a feedthrough level of -90 dB, resulting in a dynamic range of better than 55 dB.