X-ray lithography and VLSI circuits
Abstract
The use of X-ray lithography techniques in the production of very large scale integration integrated circuits is discussed. Requirements, high accuracy registration techniques, production costs, and electron beam printing processes are covered.
- Publication:
-
China Rept Sci Technol JPRS CST
- Pub Date:
- February 1985
- Bibcode:
- 1985ChRST.......44B
- Keywords:
-
- Integrated Circuits;
- Lithography;
- Very Large Scale Integration;
- X Rays;
- Accuracy;
- Electron Beams;
- Fabrication;
- Printing;
- Production Costs;
- Production Engineering;
- Requirements;
- Electronics and Electrical Engineering