Description of FRG basic research in X-ray lithography
Abstract
The role of X-ray optics in the future of computer chips is discussed. Mass production of highly integrated computer chips by means of X-ray lithography is expected to start as early as the first half of the nineties. Research and development needed to meet that deadline are examined.
- Publication:
-
West Europe Report: Science and Technology
- Pub Date:
- June 1984
- Bibcode:
- 1984wers.rept...43F
- Keywords:
-
- Automatic Control;
- Chips (Memory Devices);
- Manufacturing;
- Microelectronics;
- West Germany;
- Dust;
- Lithography;
- Quality Control;
- Semiconductors (Materials);
- Switching Circuits;
- X Ray Analysis;
- Electronics and Electrical Engineering