Cryogenic vacuum pump design
Abstract
This paper is a review of the problems and tradeoffs involved in cryogenic vacuum pump analysis, design and manufacture. Particular attention is paid to the several issues unique to cryopumps, e.g., radiation loading, adsorption of noncondensible gases, and regeneration. A general algorithm for cryopump design is also proposed.
- Publication:
-
IN: Cryogenic processes and equipment - 1984; Proceedings of the Fifth Intersociety Cryogenics Symposium
- Pub Date:
- 1984
- Bibcode:
- 1984cpeq.proc...71B
- Keywords:
-
- Cryogenic Equipment;
- Cryopumping;
- Vacuum Pumps;
- Design Analysis;
- Refrigerators;
- Regeneration (Engineering);
- Tradeoffs;
- Vapor Pressure;
- Engineering (General)