Control technology for integrated circuit fabrication at Honeywell Optoelectronics Division, Richardson, Texas
Abstract
A walk through survey of the integrated circuit fabrication operation revealed that engineering controls consisted of general and local ventilation, and isolation enclosure of the epitaxy and gas cylinder storage areas. The gas storage room was maintained at a slight negative pressure and gas monitoring was conducted. Liquid wastes were segregated according to type. Acidic wastes were pumped to a drain that carried them to a waste treatment system where they were neutralized with sodium hydroxide. Organic wastes were placed in containers which were taken to an outdoor area behind the facility where they were emptied into drums for disposal. The facility had no routine industrial hygiene program. Smocks, gloves, and safety glasses were required in all fabrication areas. Respirators were available in case of emergency. Preplacement medical examinations were not administered. Quarterly urinalyses for arsenic (7440382) exposure were conducted on all employees performing sawing operations.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- July 1984
- Bibcode:
- 1984STIN...8520162S
- Keywords:
-
- Control;
- Electro-Optics;
- Fabrication;
- Industrial Safety;
- Integrated Circuits;
- Safety Management;
- Environmental Monitoring;
- Exposure;
- Industrial Wastes;
- Materials;
- Protective Clothing;
- Engineering (General)