Development of components for micro-C oriented sensor systems
Abstract
A low cost technology for the detection of pressure and force and a digital electronic device for signal conditioning were developed. A thin silicon film plane pressure sensor for pressures between 1 and 10 bar in liquids and gases which do not attack the CuBe of the metal spring or the plastic envelope was built. A microcomputer compatible sensor system was developed. The sensor signal is time-analogously transformed to a double valued signal which can be recorded by a microcomputer.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- July 1984
- Bibcode:
- 1984STIN...8513215A
- Keywords:
-
- Analog To Digital Converters;
- Piezoelectric Gages;
- Pressure Measurement;
- Pressure Sensors;
- Electronic Transducers;
- Gas Pressure;
- Microcomputers;
- Silicon Films;
- Thin Films;
- Instrumentation and Photography