Electropulse chemical machining

Electropulse Chemical Machining, a new technique in chemical milling was applied to the photoforming of molybdenum. Direct current was applied in short pulses at current densities of thousands of amperes per square foot with little thermal degradation of resists or workpieces. Etch rates an order of magnitude faster than those of existing methods, with a corresponding improvement in surface finish were achieved. Equipment designed for pulse plating can be used and is readily available from plating suppliers. Chemicals are commercially available and may be diluted to levels that protect resist images, reduce hazards to personnel, and simplify disposal.