Time resolved calorimetry of 30 nm Te-films during laser annealing
Abstract
The temperature of 30 nm thick Te-films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystallization were observed. Boiling was identified as the prevalent mechanism for the loss of material.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- August 1984
- Bibcode:
- 1984STIN...8510346C
- Keywords:
-
- Boiling;
- Heat Measurement;
- Laser Annealing;
- Melting;
- Recrystallization;
- Tellurium;
- Thin Films;
- Calorimeters;
- Excimer Lasers;
- Laser Applications;
- Losses;
- Time;
- Lasers and Masers