A silicon technology for millimeter-wave monolithic circuits
Abstract
A silicon millimeter-wave integrated-circuit (SIMMWIC) technology that includes high-energy ion implantation and pulsed-laser annealing, secondary ion mass spectrometry (SIMS) profile diagnostics, and novel wafer thinning has been developed. This technology has been applied to a SIMMWIC single-pole single-throw (SPST) switch and to IMPATT and p-i-n diode fabrication schemes. Thus, the SIMMWIC technology is a proven base for monolithic millimeter-wave sources and control circuit applications.
- Publication:
-
RCA Review
- Pub Date:
- December 1984
- Bibcode:
- 1984RCARv..45..587S
- Keywords:
-
- Avalanche Diodes;
- Integrated Circuits;
- Microwave Circuits;
- Millimeter Waves;
- P-I-N Junctions;
- Silicon Junctions;
- Electric Switches;
- Electrical Resistivity;
- Ion Implantation;
- Laser Annealing;
- Mass Spectroscopy;
- Volt-Ampere Characteristics;
- Wafers;
- Waveguides;
- Electronics and Electrical Engineering