Integrated optical rate sensor development

A single-chip passive ring resonator (PARR) excited externally by a tunable diode laser is described. The key elements of the PARR sensor include dielectric waveguides, a waveguide resonator, directional couplers, and modulators, all integrated on a common chip by using photolithography, thin-film-deposition techniques, and ionic-diffusion processes. The sensor's stabilization and control minimum requirements for the optical and electronic setup are compared with state-of-the-art integrated optics; the loss mechanisms in waveguides are discussed; and the tailoring of low-loss waveguide resonators and coupler matrices is shown. Special consideration is given to specific design problems associated with the fabrication of masks for the waveguide topography. Results of the technological and cost analyses indicate that a gyro on a single chip is achievable, and that its batch production is sufficiently cost-effective to allow replacement of the conventional low-accuracy rate-stabilization aircraft sensors and to open new sales markets in the robotics and automobile industry. Design diagrams of PARR components and flow diagrams of fabrication techniques are included.